Gas System ntawm Etch Equipment

Cov kauj ruam etching yuav tsum tau siv ntau yam etching gases, uas tseem hu ua txheej txheem xov xwm hauv cov txheej txheem tshuaj tiv thaiv. Cov pa roj system ntawm cov khoom siv etching yog lub luag haujlwm rau kev thauj mus los ntawm cov txheej txheem nruab nrab ntawm cov pa roj mus rau sab hauv cov tshuaj tiv thaiv chamber, uas yog tsim los ntawm lub thawv roj (Gasbox), homogenizing phaj (Gaspanel), lub ntsuas dej ntws. (MFC), thiab lub raj xa dej.

Lub luag haujlwm ntawm lub thawv roj yog los kho lub siab ntawm cov txheej txheem gaseous nruab nrab ntawm cov pa roj (tshwj xeeb lub tog raj kheej lossis cov kav dej ntawm lub wafer fab) los ntawm ntau yam kev tswj li qub, thiab tom qab ntawd qhia nws mus rau hauv cov kav dej ntawm cov pa roj. cov khoom siv etching. Vim tias feem ntau ntawm cov pa roj siv hauv kev tsim cov kev sib txuas sib txuas yog qhov txaus ntshai, txhawm rau kom muaj kev nyab xeeb, lub txee ntawm lub thawv roj hluav taws xob feem ntau yog coated nrog kev tiv thaiv corrosion, thiab lub qhov rais saib sab nraud raug teeb tsa, thiab sab hauv kuj yog. nyob rau hauv lub xeev siab tsis zoo. Tsis tas li ntawd, lub thawv roj tau nruab nrog ntau yam kev saib xyuas, uas tam sim ntawd txiav tawm cov pa xa tawm thiab lub tswb nrov thaum kuaj pom cov pa tawm. Gaspanel yog ib qho tseem ceeb ntawm cov khoom siv roj, thiab nws kuj yog ib feem ntawm cov hlau semiconductor uas nyuaj rau kev ua haujlwm. Homogenizing disc feem ntau yog tsim los ntawm plaub txheej ntawm cov hlau discs, txhua qhov muaj ntau qhov me me thiab txoj hauv kev yooj yim thiab me me. Tom qab cov roj etching tau hloov kho los ntawm lub thawv roj, nws nkag mus rau hauv cov raj xa dej, thiab tom qab ntawd dhau los ntawm lub tais homogenizing, thiab thaum kawg raug thauj mus rau cov tshuaj tiv thaiv chamber ntawm qhov ceev thiab ruaj khov. Lub homogenizing disc yuav tsum muaj cov yam ntxwv ntawm qhov kub thiab txias tsis kam, tsis tshua muaj kuab paug thiab corrosion kuj, thiab cov txheej txheem tshwj xeeb yuav tsum tau siv los vuam ntawm ntau txheej hlau discs los tiv thaiv sab hauv. Vim hais tias homogenizing disc muaj feem xyuam rau cov tub ntxhais huab cua nkag mus rau hauv cov kauj ruam ntawm etching, qee lub tuam txhab khoom xaiv los koom tes nrog precision hlau ua lag luam los tsim thiab tsim homogenizing discs; Tsis tas li ntawd, Fujikin li qub hauv Nyij Pooj kuj tseem yog cov chaw tsim khoom lag luam tseem ceeb.

Cov khoom siv etching siv lub ntsuas ntsuas huab hwm coj (MFC) los saib xyuas thiab tswj tus nqi ntawm cov roj etching nkag mus rau hauv cov tshuaj tiv thaiv chamber. Vim tias cov cua nkag mus rau qhov kev ruaj ntseg ntawm cov tshuaj tiv thaiv etching, cov khoom siv etching muaj cov kev xav tau siab rau cov kev khiav dej num, tswj qhov tseeb, thiab cov lus teb ruaj khov lub sij hawm ntawm qhov ntsuas huab cua. Flowmeters tuaj yeem muab faib ua analog circuit type, digital circuit type and pressure change them type. Lub siab hloov pauv nyiaj flowmeter tuaj yeem them rov qab rau qhov hloov pauv ntawm cov roj qhov chaw siab kom ntseeg tau tias qhov ruaj khov ntawm cov pa tawm mus rau cov tshuaj tiv thaiv chamber. Lub chaw tsim khoom tseem ceeb ntawm cov ntsuas ntsuas huab cua yog Horiba hauv Nyij Pooj.