Hauv -} qhov tob ntawm lub ntsiab ntawm plaub lub ntsiab cvd thev naus laus zis

1.Tmospheric Siab Tshuaj Vauv Vapor Deposition (Apcvd)

Cov yam ntxwv txheej txheem:Nws yog nqa tawm nyob rau hauv ib txwm muaj siab (atmospheric siab), thiab cov tshuaj tiv thaiv kev tawm tsam yog qhov yooj yim thiab tus nqi tso nyiaj tau yooj yim. Txawm li cas los xij, kev ua yeeb yaj kiab zaj yeeb yaj kiab thiab kauj ruam ntawm kev pab cuam kauj ruam tsis zoo, thiab nws yog qhov yooj yim los tsim cov qias neeg vim tias muaj vapor theem vapase.

Cov ntawv thov tseem ceeb:

Cryogenic oxides: Cov ntawv thov uas nkag siab rau kev siv nyiaj thermal.

Doped / Undoped silicon iav: siv rau txheej txheem dielectric thaum ntxov epitaxial txheej: kev loj hlob ntawm ib lub crystal silicon txheej rau ntawm substrate.

Cov Txheej Txheem Qhia: Vim cov txheej txheem txwv, daim ntawv thov hauv cov txheej txheem siab heev tau poob rau hauv qee cov duab dhos ua kom zoo nkauj lossis cov duab zaj duab xim tawv tsis tas yuav ua yeeb yaj kiab heev.

Tsawg -} Kev Tshuaj Vapor Deposition (LPCvd)

Cov txheej txheem nta:Ua ntawm qhov kev ntsuas qis dua (0.1-10Torr) thiab kub siab dua (450℃-900 degree). Lub siab tsis tau txo vapor theem nucleation, ua rau muaj kev sib tw zoo dua, kev sib txawv, thiab cov kauj ruam ntawm daim nyias nyias. Qhov tsis zoo yog tus nqi thim qeeb qeeb thiab ntsuas kub.

Cov ntawv thov tseem ceeb:

Polysilicon: Cov ntaub ntawv tseem ceeb rau cov rooj vag thiab hauv zos sib tshuam. Silicon Nitride: Barrier zoo txheej, etch chos txheej, thiab lub ntsej muag tawv.

Cov kub kub oxide: high - zoo dielectric txheej Tungsten: rau kev sib cuag thiab ntawm qhov.

Cov Txheej Txheem Technum: Nws yog lub pob zeb txheem rau high - zoo zaj duab xis tso cai, tshwj xeeb tshaj yog Irreplaceable nyob rau hauv cov kauj ruam uas yuav tsum muaj siab- kub kev kho mob.

Ntshav -} Kev siv tshuaj lom neeg vapor tso (pecvd)

Cov yam ntxwv txheej txheem:Ntshav yog qhia kom ua tiav cov zaj duab xis nyias tso rau ntawm qhov kub me (200 degree}} 400 degree) siv nws cov haujlwm siab. Nws txig daws qhov teeb meem ntawm kev puas tsuaj los ntawm cov txheej txheem kub siab rau cov qauv ntawm cov khoom siv uas twb muaj lawm.

Cov ntawv thov tseem ceeb:

Rwb thaiv tsev ntawm cov hlau: tso nyiaj rau daim tawv tiv thaiv da dej rau cov hlau tsim kev sib txuas. Tsawg K tshaj tawm: txo RC latency thiab nce nti ceev.

Cov txheej passivation: Kev tiv thaiv zaum kawg ntawm cov nti tiav. Ua ntej {- cov xov xwm hlau: muab ib lub plab zom mov rau thawj txheej ntawm hlau sib tshuam.

Cov Txheej Txheem Technical: Qhov tseem ceeb siv CVD thev naus laus zis yog tus yuam sij los paub ntau {}}} - qhov xwm txheej.

0290-35673-01 DXZ SINZ SIN Chamber Assy

Kev sib piv kev sib piv thiab sib piv

Txheej Txheem Siab	XOVXWM SYSTEM	Membrane zoo	Gap sau muaj peev xwm	Daim ntawv thov tseem ceeb tshaj plaws
Tus AP	Zoo li ib txwm	Nruab nrab - siab	Sib xws	Phem	Tick ​​zaj duab xis, xaiv, tsis - tseem ceeb txheej
Lpcvd	Tsawg		Zoo meej zoo polysilicon, silicon nitride, tseem ceeb thaiv teeb meem txheej
Xoo nyeem	Qi	Qi	Zoo	Zoo	Rwb thaiv tsev txheej ntawm hlau, passivation txheej, qis k nruab nrab
HDPCvd	Tsawg Mid zoo meej zoo meej sti, siab nam piv sib sau

Nyob rau hauv lub chip tsim kev txhim kho, txhua ntawm plaub lub luag haujlwm ntawm plaub lub luag haujlwm: LPCvd yog lub luag haujlwm rau kev tso lub siab - zoo} Cov khoom lag luam zoo.

Pecvd lays ntau ntawm dielectric thiab tiv thaiv txheej hauv qab - {}}}}}}}}}}}}} qhov chaw ib puag ncig

HDPCvd tshwj xeeb hauv kev daws cov txheej txheem nyuaj tshaj plaws APCVD muab kev ua si tag nrho rau nws qhov zoo ntawm kev tso nyiaj sai hauv cov teb.